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The ExciStar XS series from Coherent, Inc. represents a compact, economical excimer laser offering performance and lifetime characteristics. The air cooled ExciStar XS measures 0,08 m3, yet delivers pulse energies up to 12mJ at 248nm with an energy stability of <2% (1s), at repetition rates of 500 Hz. The use of Almeta XS tube design and all solid state pulser results in a product lifetime that lasts for more than 1 billion pulses than that of tube and optics.